Muminov Ramizullo Abdullaevich, Saymbetov Akhmet Kuvanchbekovich, Toshmurodov Yorkin Kakhramonovich, Ergashev Giyos Zhuraevich, Yavkochliev Makhmudjon Otamurodovich. FEATURES MECHANICAL AND CHEMICAL TREATMENT OF SEMICONDUCTOR SILICON PLATES. AoC [Internet]. 2020Sep.22 [cited 2024Nov.15];6(1):39-44. Available from: https://conferencepublication.com/index.php/aoc/article/view/220